Plasma etch challenges for next-generation semiconductor manufacturing
Etch Overview
Isotropic Etching | SpringerLink
Chromium oxide as a hard mask material better than metallic chromium: Journal of Vacuum Science & Technology B: Vol 35, No 6
Electro-Etching Steel using vinyl mask- Attempt #2 - YouTube
A novel mask technology of glass HF etching and application in photovoltaic cells - ScienceDirect
Etching Mirror Facets on SOI Optical Waveguides - Tech Briefs
What is the Bosch Process (Deep Reactive Ion Etching)? - Samco Inc.
Etching - LNF Wiki
Laminar flow used as “liquid etch mask” in wet chemical etching to generate glass microstructures with an improved aspect ratio - Lab on a Chip (RSC Publishing) DOI:10.1039/B904769G
Micromachines | Free Full-Text | Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication | HTML
How can I etch Cr hard mask successfully after a dry etching step?
Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS | Micro and Nano Systems Letters | Full Text
The fabrication process of the etching masks. (a) Fabrication of 12 µm... | Download Scientific Diagram
PDF] A Novel Thermally Evaporated Etching Mask for Low-Damage Dry Etching | Semantic Scholar
Etching Mask
Etch Overview
Integrated process feasibility of hard-mask for tight pitch interconnects fabrication (MEMS and Nanotechnology)
Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si
RIE Etching
The fabrication process of the etching masks. (a) Fabrication of 12 µm... | Download Scientific Diagram
Etching mask (PR) 1. The figure on the right shows a | Chegg.com
Cleanroom
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review | Micro and Nano Systems Letters | Full Text